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Physics > Optics

arXiv:physics/0512073 (physics)
[Submitted on 8 Dec 2005]

Title:Overlay Alignment Using Two Photonic Crystals

Authors:Can Peng, Keith Morton, Zhaoning Yu, Stephen Y. Chou
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Abstract: In this paper we proposed a novel overlay alignment method using two sets of identical photonic crystals (PhCs). In this method the reflection or transmission spectrum of the two overlaid photonic crystals is measured to help wafer tilt, yaw rotation, and translation aligning. The initial testing results with two 1D photonic crystals and analysis of the alignment accuracy are presented. This method is particularly useful in building photonic crystal stacks with nanoimprint lithography (NIL).
Comments: 13pages 6 figures
Subjects: Optics (physics.optics)
Cite as: arXiv:physics/0512073 [physics.optics]
  (or arXiv:physics/0512073v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.physics/0512073

Submission history

From: Can Peng [view email]
[v1] Thu, 8 Dec 2005 16:33:49 UTC (156 KB)
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