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Physics > Data Analysis, Statistics and Probability

arXiv:physics/0303039 (physics)
[Submitted on 10 Mar 2003]

Title:Statistical Yield Modeling for IC Manufacture: Hierarchical Fault Distributions

Authors:Yu.I. Bogdanov, N.A. Bogdanova, V.L. Dshkhunyan
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Abstract: A hierarchical approach to the construction of compound distributions for process-induced faults in IC manufacture is proposed. Within this framework, the negative binomial distribution and the compound binomial distribution are treated as level-1 models. The hierarchical approach to fault distribution offers an integrated picture of how fault density varies from region to region within a wafer, from wafer to wafer within a batch, and so on. A theory of compound-distribution hierarchies is developed by means of generating functions. With respect to applications, hierarchies of yield means and yield probability-density functions are considered and an in-process measure of yield loss is introduced. It is shown that the hierarchical approach naturally embraces the Bayesian approach.
Comments: OAO Angstrem, Moscow Institute of Electronic Engineering (Technical University), Moscow, Russia, 19 pages, 2 figures
Subjects: Data Analysis, Statistics and Probability (physics.data-an); Statistical Mechanics (cond-mat.stat-mech)
Cite as: arXiv:physics/0303039 [physics.data-an]
  (or arXiv:physics/0303039v1 [physics.data-an] for this version)
  https://doi.org/10.48550/arXiv.physics/0303039
Journal reference: Russian Microelectronics, 2003, V.32, N 1, P. 51

Submission history

From: Yurii Ivanovich Bogdanov [view email]
[v1] Mon, 10 Mar 2003 13:13:57 UTC (262 KB)
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