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Condensed Matter > Materials Science

arXiv:cond-mat/0210400 (cond-mat)
[Submitted on 18 Oct 2002]

Title:Formation of clean dimers during gas-source growth of Si(001)

Authors:D.R.Bowler
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Abstract: Elevated temperature STM measurements have shown that one key phase during gas-source homoepitaxy of Si(001) is the formation of clean Si ad-dimers from hydrogenated ad-dimers, though the mechanism for this formation is unknown. We present ab initio density functional calculations designed to explore this mechanism. The calculations show that there is a pathway consistent with the experimentally observed reaction rates, which proceeds via a meta-stable intermediate, and is effectively irreversible. This result fills a vital gap in our understanding of the atomic-scale details of gas-source growth of Si(001).
Comments: 6 pages, 8 figures, submitted to Phys. Rev. B
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:cond-mat/0210400 [cond-mat.mtrl-sci]
  (or arXiv:cond-mat/0210400v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.cond-mat/0210400
Related DOI: https://doi.org/10.1103/PhysRevB.67.115341

Submission history

From: David Bowler [view email]
[v1] Fri, 18 Oct 2002 09:57:41 UTC (52 KB)
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