Condensed Matter > Materials Science
[Submitted on 13 Jul 2024 (v1), last revised 17 Jul 2024 (this version, v2)]
Title:Ferroelectric AlBN Films by Molecular Beam Epitaxy
View PDF HTML (experimental)Abstract:We report the properties of molecular beam epitaxy deposited AlBN thin films on a recently developed epitaxial nitride metal electrode Nb2N. While a control AlN thin film exhibits standard capacitive behavior, distinct ferroelectric switching is observed in the AlBN films with increasing Boron mole fraction. The measured remnant polarization Pr of 15 uC/cm2 and coercive field Ec of 1.45 MV/cm in these films are smaller than those recently reported on films deposited by sputtering, due to incomplete wake-up, limited by current leakage. Because AlBN preserves the ultrawide energy bandgap of AlN compared to other nitride hi-K dielectrics and ferroelectrics, and it can be epitaxially integrated with GaN and AlN semiconductors, its development will enable several opportunities for unique electronic, photonic, and memory devices.
Submission history
From: Chandrashekhar Prakash Savant [view email][v1] Sat, 13 Jul 2024 01:42:10 UTC (12,482 KB)
[v2] Wed, 17 Jul 2024 21:59:05 UTC (12,482 KB)
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