Physics > Medical Physics
[Submitted on 13 Nov 2023 (v1), last revised 8 Jul 2024 (this version, v2)]
Title:Shot noise-mitigated secondary electron imaging with ion count-aided microscopy
View PDF HTML (experimental)Abstract:Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image quality do not fundamentally mitigate the noise sources. Furthermore, barriers to assigning a physically meaningful scale make the images qualitative. Here we introduce ion count-aided microscopy (ICAM), which is a quantitative imaging technique that uses statistically principled estimation of the secondary electron yield. With a readily implemented change in data collection, ICAM substantially reduces source shot noise. In helium ion microscopy, we demonstrate 3x dose reduction and a good match between these empirical results and theoretical performance predictions. ICAM facilitates imaging of fragile samples and may make imaging with heavier particles more attractive.
Submission history
From: Akshay Agarwal [view email][v1] Mon, 13 Nov 2023 01:07:47 UTC (17,165 KB)
[v2] Mon, 8 Jul 2024 16:23:56 UTC (21,772 KB)
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