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Physics > Instrumentation and Detectors

arXiv:2305.19631 (physics)
[Submitted on 31 May 2023 (v1), last revised 6 Oct 2023 (this version, v3)]

Title:Roadmap for focused ion beam technologies

Authors:Katja Höflich, Gerhard Hobler, Frances I. Allen, Tom Wirtz, Gemma Rius, Lisa McElwee-White, Arkady V. Krasheninnikov, Matthias Schmidt, Ivo Utke, Nico Klingner, Markus Osenberg, Rosa Córdoba, Flyura Djurabekova, Ingo Manke, Philip Moll, Mariachiara Manoccio, José Marıa De Teresa, Lothar Bischoff, Johann Michler, Olivier De Castro, Anne Delobbe, Peter Dunne, Oleksandr V. Dobrovolskiy, Natalie Frese, Armin Gölzhäuser, Paul Mazarov, Dieter Koelle, Wolfhard Möller, Francesc Pérez-Murano, Patrick Philipp, Florian Vollnhals, Gregor Hlawacek
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Abstract:The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
Comments: This publication is based upon work from the COST Action FIT4NANO CA19140, supported by COST (European Cooperation in Science and Technology) this https URL. Financial support from COST Action CA19140 is acknowledged this http URL Version 3 has many text and language edits as well as layout tuning but no substantial new content
Subjects: Instrumentation and Detectors (physics.ins-det); Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2305.19631 [physics.ins-det]
  (or arXiv:2305.19631v3 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.2305.19631

Submission history

From: Gregor Hlawacek [view email]
[v1] Wed, 31 May 2023 07:59:05 UTC (37,350 KB)
[v2] Tue, 13 Jun 2023 15:02:20 UTC (34,913 KB)
[v3] Fri, 6 Oct 2023 21:02:36 UTC (30,535 KB)
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