Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Physics > Applied Physics

arXiv:2304.05593 (physics)
[Submitted on 12 Apr 2023 (v1), last revised 3 Aug 2024 (this version, v2)]

Title:Crack-free high composition (>35%) thick (>30 nm) barrier AlGaN/AlN/GaN HEMT on sapphire with record low sheet resistance

Authors:Swarnav Mukhopadhyay, Cheng Liu, Jiahao Chen, Surjava Sanyal, Ruixin Bai, Guangying Wang, Chirag Gupta, Shubhra Pasayat
View PDF
Abstract:In this article, high composition (>35%) thick (>30 nm) barrier AlGaN/AlN/GaN HEMT structure grown on a sapphire substrate with ultra-low sheet resistivity (<250 \Omega / \Box ) is reported. Optimization of growth conditions, such as reduced growth rate, low carbon incorporation, and thickness optimization of different epitaxial layers allowed to grow a crack-free high composition and thick AlGaN barrier layer HEMT structure. A significantly high two-dimensional electron gas (2DEG) density of 1.46 \times 10^{13} cm^{-2} with a room temperature mobility of 1710 cm^{2}/V.s is obtained by Hall measurement using the Van-Der-Pauw method. These state-of-the-art results show great potential for high-power Ga-polar HEMT design on the sapphire substrate.
Comments: 14 pages, 7 main figures (Total=11 figures), 2 tables
Subjects: Applied Physics (physics.app-ph); Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2304.05593 [physics.app-ph]
  (or arXiv:2304.05593v2 [physics.app-ph] for this version)
  https://doi.org/10.48550/arXiv.2304.05593
Journal reference: Crystals 2023, 13(10), 1456
Related DOI: https://doi.org/10.3390/cryst13101456

Submission history

From: Swarnav Mukhopadhyay [view email]
[v1] Wed, 12 Apr 2023 03:44:34 UTC (897 KB)
[v2] Sat, 3 Aug 2024 23:55:28 UTC (1,210 KB)
Full-text links:

Access Paper:

  • View PDF
  • Other Formats
license icon view license
Current browse context:
physics.app-ph
< prev   |   next >
new | recent | 2023-04
Change to browse by:
cond-mat
cond-mat.mtrl-sci
physics

References & Citations

export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)