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Physics > Plasma Physics

arXiv:2302.12499 (physics)
[Submitted on 24 Feb 2023 (v1), last revised 2 Mar 2023 (this version, v2)]

Title:Generation of energetic electrons by surface waves in VHF CCPs

Authors:D. Eremin, E. Kemaneci, M. Matsukuma, I. Kaganovich, T. Mussenbrock, R.P. Brinkmann
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Abstract:Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is limited by the emergence of plasma radial nonuniformity detrimental for applications. The nonuniformity is caused by interactions of surface waves natural to the plasma-filled reactor with electrons of the plasma, leading to the complex electron energization and ionization dynamics. Using a self-consistent fully electromagnetic energy- and charge-conserving implicit particle-in-cell code ECCOPIC2M, we demonstrate that the electron energization and ionization profiles result from an involved interplay between different phenomena, demanding a kinetic and non-local description for the low pressures considered. Changes in the surface wave excitation with the driving frequency are discussed.
Subjects: Plasma Physics (physics.plasm-ph)
Cite as: arXiv:2302.12499 [physics.plasm-ph]
  (or arXiv:2302.12499v2 [physics.plasm-ph] for this version)
  https://doi.org/10.48550/arXiv.2302.12499

Submission history

From: Denis Eremin [view email]
[v1] Fri, 24 Feb 2023 07:53:56 UTC (1,426 KB)
[v2] Thu, 2 Mar 2023 10:15:46 UTC (1,430 KB)
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