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Physics > Optics

arXiv:2207.14161 (physics)
[Submitted on 28 Jul 2022]

Title:Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution

Authors:Ralfy Kenaz, Ronen Rapaport
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Abstract:Spectroscopic ellipsometry is a widely used optical technique both in industry and research for determining the optical properties and thickness of thin films. The effective use of spectroscopic ellipsometry on micro-structures is inhibited by technical limitations on lateral resolution and data acquisition rate. Here we introduce a spectroscopic micro-ellipsometer (SME), capable of measuring spectrally resolved ellipsometric data at many angles of incidence in a single-shot with a lateral resolution down to 2 microns. The SME can be easily integrated into generic optical microscopes by addition of a few stock optics. We demonstrate complex refractive index and thickness measurements by the SME which are in excellent agreement with a commercial spectroscopic ellipsometer. As an application for its accuracy and high lateral resolution, the SME can characterize the optical properties and number of layers of exfoliated transition-metal dichalcogenides and graphene, for structures that are a few microns in size.
Subjects: Optics (physics.optics)
Cite as: arXiv:2207.14161 [physics.optics]
  (or arXiv:2207.14161v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.2207.14161
Journal reference: Rev. Sci. Instrum. 94, 023908 (2023)
Related DOI: https://doi.org/10.1063/5.0123249

Submission history

From: Ralfy Kenaz [view email]
[v1] Thu, 28 Jul 2022 15:22:14 UTC (1,662 KB)
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