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Physics > Applied Physics

arXiv:2111.02884 (physics)
[Submitted on 2 Nov 2021 (v1), last revised 24 Sep 2022 (this version, v2)]

Title:Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits

Authors:Aleksandr V. Tronev (1), Mikhail V. Parfenov (1), Sergey I. Bozhko (2), Andrey M. Ionov (2), Rais N. Mozhchil (2), Sergey V. Chekmazov (2), Petr M. Agruzov (1), Igor V. Ilichev (1), Aleksandr V. Shamrai (1) ((1) Ioffe Institute, Saint Petersburg, Russia, (2) Institute of Solid State Physics of the Russian Academy of Sciences, Chernogolovka, Russia)
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Abstract:Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies.
Comments: 15 pages, 10 figures, published in Optical Materials Express
Subjects: Applied Physics (physics.app-ph); Optics (physics.optics)
Cite as: arXiv:2111.02884 [physics.app-ph]
  (or arXiv:2111.02884v2 [physics.app-ph] for this version)
  https://doi.org/10.48550/arXiv.2111.02884
Journal reference: Opt. Mater. Express 12 (2022) 4072-4087
Related DOI: https://doi.org/10.1364/OME.465690

Submission history

From: Aleksandr Tronev [view email]
[v1] Tue, 2 Nov 2021 14:17:59 UTC (15,783 KB)
[v2] Sat, 24 Sep 2022 11:51:22 UTC (1,241 KB)
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