Physics > Optics
[Submitted on 7 Sep 2021]
Title:Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion Engineering of Broadband Microresonator Frequency Combs
View PDFAbstract:Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a significant impact on material dispersion and hence the overall microresonator dispersion. In contrast to the many efforts focused on comparison between Si-rich films and stoichiometric (Si$_3$N$_4$) films, here we entirely focus on films that are within the nominally stoichiometric growth regime. We further show that microresonator geometric dispersion can be tuned to compensate for changes in the material dispersion.
Current browse context:
physics.optics
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.