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Physics > Applied Physics

arXiv:2103.14543 (physics)
[Submitted on 26 Mar 2021]

Title:Donor implanted Back-gates in GaAs for MBE-grown highest mobility two-dimensional electron systems

Authors:Jan Scharnetzky, Philipp Baumann, Christian Reichl, Helmut Karl, Werner Dietsche, Werner Wegscheider
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Abstract:Three different elements, Silicon, Selenium, and Tellurium, are ion-implanted in Gallium arsenide to form a conducting layer that serves as a back-gate to a molecular beam epitaxy (MBE) overgrown two-dimensional electron gas (2DEG). While the heavy ion Tellurium creates too many damages in the gallium arsenide to form a conducting layer, both Silicon and Selenium show promising results combined with MBE-grown high-quality 2DEGs. Similar 2DEG mobility compared to non-implanted reference samples is achieved for both Silicon and Selenium implanted structures. Individual contacts to the back-gate are challenging. However, Silicon implanted structures, annealed before the MBE growth, result in a function back-gate, and the electron density of the 2DEG is tuned via the back-gate.
Comments: 10 pages, 4 figures
Subjects: Applied Physics (physics.app-ph); Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:2103.14543 [physics.app-ph]
  (or arXiv:2103.14543v1 [physics.app-ph] for this version)
  https://doi.org/10.48550/arXiv.2103.14543
Related DOI: https://doi.org/10.1088/1361-6641/ac0d9a

Submission history

From: Jan Scharnetzky [view email]
[v1] Fri, 26 Mar 2021 15:49:04 UTC (5,705 KB)
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