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Mathematics > Analysis of PDEs

arXiv:2103.06772 (math)
[Submitted on 11 Mar 2021]

Title:On a Free Boundary Model for Three-Dimensional MEMS with a Hinged Top Plate I: Stationary Case

Authors:Katerina Nik
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Abstract:A stationary free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at different voltages. The model couples a nonlocal fourth-order equation for the deformation of the top plate to a Laplace equation for the electrostatic potential in the free domain between the two plates. The strength of the coupling is tuned by a parameter $\lambda$ which is proportional to the square of the applied voltage difference. Existence of a stable stationary solution is established for small values of $\lambda$. Nonexistence of stationary solutions is obtained when $\lambda$ is large enough.
Subjects: Analysis of PDEs (math.AP)
Cite as: arXiv:2103.06772 [math.AP]
  (or arXiv:2103.06772v1 [math.AP] for this version)
  https://doi.org/10.48550/arXiv.2103.06772

Submission history

From: Katerina Nik [view email]
[v1] Thu, 11 Mar 2021 16:32:36 UTC (536 KB)
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