Condensed Matter > Materials Science
[Submitted on 19 Feb 2021 (v1), last revised 26 May 2021 (this version, v2)]
Title:Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy
View PDFAbstract:Aberration-corrected scanning transmission electron microscopy (STEM) is widely used for atomic-level imaging of materials. To accelerate the discovery of new materials based on atomic-level investigations, the throughput of aberration-corrected STEM experiments becomes more and more important. However, the throughput of the full workflow of aberration-corrected STEM is still quite low. A fundamental problem is that the preparation of high-quality thin STEM samples (lamellae) depends on manual operation. Here, inspired by the recent successes of "robot scientists", we demonstrate robotic fabrication of high-quality lamellae by focused-ion-beam (FIB) with full automation software. First, we show that robotic FIB can prepare lamellae with a high success rate, where the robotic FIB controls rough-milling, lift-out, and final-thinning processes. Then, we optimize the FIB parameters of the final-thinning process for single crystal Si. Aberration-corrected STEM imaging of these Si lamellae shows atomic-level images with 55 pm resolution. We also demonstrate robotic fabrication of high-quality lamellae of SrTiO3 and sapphire. The robotic FIB system will resolve the current bottleneck of the full workflow of aberration-corrected STEM analysis and accelerate materials discovery based on atomic-level imaging.
Submission history
From: Teruyasu Mizoguchi [view email][v1] Fri, 19 Feb 2021 01:11:17 UTC (1,418 KB)
[v2] Wed, 26 May 2021 05:36:25 UTC (1,739 KB)
Current browse context:
cond-mat.mtrl-sci
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
IArxiv Recommender
(What is IArxiv?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.