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Physics > Optics

arXiv:1910.10880 (physics)
[Submitted on 24 Oct 2019]

Title:Demonstration of beta-Ga2O3 Optical Waveguides and the Analysis of Their Propagation Losses in the UV-Visible Spectra

Authors:Jingan Zhou, Hong Chen, Houqiang Fu, Kai Fu, Xuguang Deng, Xuanqi Huang, Tsung-Han Yang, Jossue A. Montes, Chen Yang, Xin Qi, Baoshun Zhang, Xiaodong Zhang, Yuji Zhao
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Abstract:This paper reports the first demonstration of beta-phase gallium oxide as optical waveguides on sapphire substrates grown by metal-organic chemical vapor deposition (MOCVD). The propagation losses from visible to ultraviolet spectra were comprehensively studied. By optimizing the fabrication processes, minimum propagation loss was identified to be 3.7 dB/cm at the wavelength of 810 nm, which is comparable to other wide bandgap materials within the III-N family (GaN, AlN). To further reveal the underlying loss mechanisms, several physical mechanisms such as two-photon absorption, sidewall scattering, top surface scattering, and bulk scattering were taken into consideration. The results obtained from this work suggest that beta-Ga2O3 is promising for ultraviolet-visible spectrum integrated photonic applications.
Comments: 14 pages and 6 figures
Subjects: Optics (physics.optics); Applied Physics (physics.app-ph)
Cite as: arXiv:1910.10880 [physics.optics]
  (or arXiv:1910.10880v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.1910.10880

Submission history

From: Jingan Zhou [view email]
[v1] Thu, 24 Oct 2019 02:12:50 UTC (719 KB)
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