Physics > Applied Physics
[Submitted on 15 Oct 2019 (this version), latest version 26 Nov 2019 (v2)]
Title:Niobium nitride thin films prepared by atomic layer deposition for efficient superconducting nanowire single-photon detectors
View PDFAbstract:High-quality ultra-thin films of niobium nitride (NbN) are developed by plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon detectors (SNSPDs) patterned from this material exhibit high switching currents and saturated internal efficiencies over a broad bias range at 1550 nm telecommunication wavelength. Statistical analyses on hundreds of fabricated devices show near-unity fabrication yield due to exceptional homogeneity of the films with few defects. This ALD-NbN material is an ideal superconducting material for fabricating large single-photon detector arrays combining high efficiency, low jitter, low dark counts as well as large detection area.
Submission history
From: Risheng Cheng [view email][v1] Tue, 15 Oct 2019 19:42:45 UTC (645 KB)
[v2] Tue, 26 Nov 2019 03:35:30 UTC (638 KB)
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