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Condensed Matter > Materials Science

arXiv:1901.00766 (cond-mat)
[Submitted on 1 Jan 2019]

Title:First-Principle Study of Phosphine Adsorption on Si(001)-2$\times$1-Cl

Authors:Tatiana V. Pavlova, Georgy M. Zhidomirov, Konstantin N. Eltsov
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Abstract:This paper presents a DFT study for phosphine adsorption on a Si(001)-2$\times$1 surface covered by a chlorine monolayer, including adsorption on local defects, i.e. mono- and bivacancies in the adsorbate layer (Cl, Cl$_2$), and combined vacancies with removed silicon atoms (SiCl, SiCl$_2$). Activation barriers were found for the adsorbing PH$_3$ to dissociate into PH$_2$+H and PH+H$_2$ fragments; it was also established that phosphine dissociation on combined vacancies is possible at room temperature. If there is a silicon vacancy on the surface, phosphorus settles in the Si(001) lattice as PH (if the vacancy is SiCl) or as PH$_2$ (if the vacancy is SiCl$_2$). This paper suggests a method to plant a separate phosphorus atom into the silicon surface layer with atomic precision, using phosphine adsorption on defects specially created on a Si(001)-2$\times$1-Cl surface with an STM tip.
Subjects: Materials Science (cond-mat.mtrl-sci); Other Condensed Matter (cond-mat.other)
Cite as: arXiv:1901.00766 [cond-mat.mtrl-sci]
  (or arXiv:1901.00766v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1901.00766
Journal reference: Journal of Physical Chemistry C, 122 (2018) 1741-1745
Related DOI: https://doi.org/10.1021/acs.jpcc.7b11519

Submission history

From: Tatiana Pavlova [view email]
[v1] Tue, 1 Jan 2019 20:39:11 UTC (1,423 KB)
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