Physics > Optics
This paper has been withdrawn by Duc Trung Nguyen
[Submitted on 17 Dec 2018 (v1), last revised 11 Apr 2019 (this version, v2)]
Title:Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy
No PDF available, click to view other formatsAbstract:A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.
Submission history
From: Duc Trung Nguyen [view email][v1] Mon, 17 Dec 2018 01:49:40 UTC (559 KB) (withdrawn)
[v2] Thu, 11 Apr 2019 07:50:14 UTC (1 KB) (withdrawn)
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