Physics > Optics
[Submitted on 7 Dec 2016]
Title:Release-free silicon-on-insulator cavity optomechanics
View PDFAbstract:We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and processing capabilities via electronic, photonic, and phononic degrees freedom in a single scalable platform.
Submission history
From: Amir H. Safavi-Naeini [view email][v1] Wed, 7 Dec 2016 20:48:24 UTC (2,460 KB)
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