Physics > Optics
[Submitted on 3 Sep 2016 (v1), last revised 8 Sep 2016 (this version, v2)]
Title:Etch-Tuning and Design of Silicon Nitride Photonic Crystal Reflectors
View PDFAbstract:By patterning a freestanding dielectric membrane into a photonic crystal reflector (PCR), it is possible to resonantly enhance its normal-incidence reflectivity, thereby realizing a thin, single-material mirror. In many PCR applications, the operating wavelength (e.g. that of a low-noise laser or emitter) is not tunable, imposing tolerances on crystal geometry that are not reliably achieved with standard nanolithography. Here we present a gentle technique to finely tune the resonant wavelength of a SiN PCR using iterative hydrofluoric acid etches. With little optimization, we achieve a 57-nm-thin photonic crystal having an operating wavelength within 0.15 nm (0.04 resonance linewidths) of our target (1550 nm). Our thin structure exhibits a broader and less pronounced transmission dip than is predicted by plane wave simulations, and we identify two effects leading to these discrepancies, both related to the divergence angle of a collimated laser beam. To overcome this limitation in future devices, we distill a series of simulations into a set of general design considerations for realizing robust, high-reflectivity resonances.
Submission history
From: Jack Sankey [view email][v1] Sat, 3 Sep 2016 20:06:32 UTC (554 KB)
[v2] Thu, 8 Sep 2016 19:16:24 UTC (554 KB)
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