Physics > Instrumentation and Detectors
[Submitted on 27 Jun 2016]
Title:Infrared vertically-illuminated photodiode for chip alignment feedback
View PDFAbstract:We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm, a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.
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