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Physics > Instrumentation and Detectors

arXiv:1510.01876 (physics)
[Submitted on 7 Oct 2015 (v1), last revised 7 Jan 2016 (this version, v2)]

Title:Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array

Authors:G. Coiffard, K-F. Schuster, E.F.C. Driessen, S. Pignard, M. Calvo, A. Catalano, J. Goupy, A. Monfardini
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Abstract:We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to <25 %. Measurements of a 132-pixel mKID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium mKIDs. We measured a noise equivalent power of NEP = 3.6e-15 W/Hz^(1/2). Finally, we describe possible routes to further improve the performance of these TiN mKID arrays.
Comments: 7 pages, 4 figures, submitted to Journal of low temperature physics, Proceedings of LTD-16
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1510.01876 [physics.ins-det]
  (or arXiv:1510.01876v2 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.1510.01876
Related DOI: https://doi.org/10.1007/s10909-016-1489-9

Submission history

From: Grégoire Coiffard [view email]
[v1] Wed, 7 Oct 2015 09:56:00 UTC (943 KB)
[v2] Thu, 7 Jan 2016 12:21:30 UTC (933 KB)
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