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Condensed Matter > Materials Science

arXiv:1411.1614 (cond-mat)
[Submitted on 6 Nov 2014 (v1), last revised 22 Nov 2014 (this version, v2)]

Title:Study of magnetic iron nitride thin films deposited by high power impulse magnetron sputtering

Authors:Akhil Tayal, Mukul Gupta, Ajay Gupta, V. Ganesan, Layanta Behera, Surendra Singh, Saibal Basu
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Abstract:In this work, we studied phase formation, structural and magnetic properties of iron-nitride (Fe-N) thin films deposited using high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (dc-MS). The nitrogen partial pressure during deposition was systematically varied both in HiPIMS and dc-MS. Resulting Fe-N films were characterized for their microstructure, magnetic properties and nitrogen concentration. We found that HiPIMS deposited Fe-N films show a globular nanocrystalline microstructure and improved soft magnetic properties. In addition, it was found that the nitrogen reactivity impedes in HiPIMS as compared to dc-MS. Obtained results can be understood in terms of distinct plasma properties of HiPIMS.
Comments: 7 Pages, 7 Figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1411.1614 [cond-mat.mtrl-sci]
  (or arXiv:1411.1614v2 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1411.1614

Submission history

From: Mukul Gupta [view email]
[v1] Thu, 6 Nov 2014 13:51:22 UTC (595 KB)
[v2] Sat, 22 Nov 2014 05:36:20 UTC (596 KB)
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