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Physics > Instrumentation and Detectors

arXiv:1303.6477 (physics)
[Submitted on 26 Mar 2013 (v1), last revised 6 Dec 2013 (this version, v8)]

Title:High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry

Authors:Tianxiang Chen, Haijun Yang, Keith Riles, Cheng Li
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Abstract:In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in Z direction.
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1303.6477 [physics.ins-det]
  (or arXiv:1303.6477v8 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.1303.6477

Submission history

From: Tianxiang Chen Tianxiang Chen [view email]
[v1] Tue, 26 Mar 2013 13:19:32 UTC (871 KB)
[v2] Wed, 27 Mar 2013 04:43:36 UTC (1 KB) (withdrawn)
[v3] Fri, 29 Mar 2013 05:47:25 UTC (1 KB) (withdrawn)
[v4] Mon, 24 Jun 2013 08:20:41 UTC (254 KB)
[v5] Thu, 17 Oct 2013 02:12:16 UTC (270 KB)
[v6] Fri, 18 Oct 2013 03:17:25 UTC (272 KB)
[v7] Mon, 21 Oct 2013 05:07:32 UTC (272 KB)
[v8] Fri, 6 Dec 2013 13:15:15 UTC (271 KB)
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