Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Physics > Optics

arXiv:1207.3841 (physics)
[Submitted on 16 Jul 2012]

Title:Dispersion engineered high-Q silicon Nitride Ring-Resonators via Atomic Layer Deposition

Authors:Johann Riemensberger, Klaus Hartinger, Tobias Herr, Victor Brasch, Ronald Holzwarth, Tobias J. Kippenberg
View PDF
Abstract:We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition (ALD). Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. All results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum.
Comments: 4 pages, 4 figures
Subjects: Optics (physics.optics)
Cite as: arXiv:1207.3841 [physics.optics]
  (or arXiv:1207.3841v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.1207.3841
Journal reference: Optics Express Vol. 20, Issue 25, pp. 27661-27669 (2012)
Related DOI: https://doi.org/10.1364/OE.20.027661

Submission history

From: Johann Riemensberger [view email]
[v1] Mon, 16 Jul 2012 22:55:38 UTC (877 KB)
Full-text links:

Access Paper:

  • View PDF
  • TeX Source
  • Other Formats
view license
Current browse context:
physics.optics
< prev   |   next >
new | recent | 2012-07
Change to browse by:
physics

References & Citations

export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)