Physics > Fluid Dynamics
[Submitted on 20 Apr 2012 (v1), last revised 1 Jun 2012 (this version, v2)]
Title:Contribution of Acoustic Losses in the Quality Factor of a Micromechanical Resonator
View PDFAbstract:A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many applications and depends on structural geometry, interaction with the external environment, and the encapsulation method. Resonators with at least one surface exposed to air can display losses through acoustic radiation even at micro meter dimensions. Published experimental results suggest the dominance of acoustic losses in the Q of a MEMS drum resonator. In this study, a well established mathematical techniques to analytically model resonator vibration modes and fluid-structure interaction are used, and a semi-analytical procedure for computing Q due to acoustic radiation losses, Qac, in any vibrational mode outlined. Present technique includes calculation of the exact mode shape and its utilization in computing Qac. The dependence of Qac on the first 15 mode shapes is computed. Results are compared for the lowest 2 modes of a solid circular resonator using exact mode shapes to those of Lamb's approximate mode shapes. Comparison to published experimental results validates the predictive utility of the technique, especially for higher modes where acoustic radiation seems to be the dominant constituent of Q.
Submission history
From: Jeevak Parpia [view email][v1] Fri, 20 Apr 2012 19:01:45 UTC (1,667 KB)
[v2] Fri, 1 Jun 2012 02:51:07 UTC (1,675 KB)
Current browse context:
physics.flu-dyn
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.