Title:Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature

Abstract:Nanomechanical resonators have received significant attention both in fundamental experiments and sensing applications in recent years. This is a direct consequence of their high resonance frequencies as well as low masses. However, because of their small size, they couple only weakly to their environment. This coupling can be strongly enhanced via an optical or electrical microwave cavity, where the latter enables large scale integration. Up to now nanoelectromechanical transduction via microwave cavities is predominantly performed at cryogenic temperatures to benefit from superconducting materials. We present an approach based on a microstrip cavity at room temperature and dielectrically couple it to a doubly-clamped pre-stressed silicon nitride beam, without reducing its high mechanical quality factor of 290,000 at 6 MHz. Cavity-enhanced detection allows to probe the resonator's Brownian motion with 0.75 pm/Hz^1/2 sensitivity. Furthermore, backaction of the microwave photons enables cavity-pumped self-oscillation yielding an estimated mass resolution of about 10^-18 g. Thereby, an adjustement-free, all-integrated and self-driven nanoelectromechanical resonator array interfaced by just two microwave connectors is realised.