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Physics > Classical Physics

arXiv:0912.2711 (physics)
[Submitted on 14 Dec 2009]

Title:Tilted Micro Air Jet for Flow Control

Authors:Julien Malapert (FEMTO-ST), Réda Yahiaoui (FEMTO-ST), Rabah Zeggari (FEMTO-ST), Jean-François Manceau (FEMTO-ST)
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Abstract: In this paper, we present an interesting method to microfabricate a tilted micro air jet generator. We used the well-know deep reactive ion etching (DRIE) technique in order to realize in a silicon substrate a double side etching. For aircraft and cars, micro air jets will take an important place for fluid control. Micro air jets are characterized by their speed, frequency and tilt. Usually, this micro air jets are produced by fluidic microsystems. We presented experimental results about micro tilted air jets. A comparison between finite element method simulation, theory and experimental results are performed to define the microsystem geometry leading a specific air jet angle.
Subjects: Classical Physics (physics.class-ph); Fluid Dynamics (physics.flu-dyn)
Cite as: arXiv:0912.2711 [physics.class-ph]
  (or arXiv:0912.2711v1 [physics.class-ph] for this version)
  https://doi.org/10.48550/arXiv.0912.2711
Journal reference: European COMSOL Conference, Milan : Italy (2009)

Submission history

From: Julien Malapert [view email] [via CCSD proxy]
[v1] Mon, 14 Dec 2009 19:16:45 UTC (577 KB)
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