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Physics > Optics

arXiv:0912.0788 (physics)
[Submitted on 4 Dec 2009]

Title:Deterministic tuning of slow-light in photonic-crystal waveguides through the C and L bands by atomic layer deposition

Authors:Charlton J. Chen, Chad A. Husko, Inanc Meric, Ken L. Shepard, Chee Wei Wong, William M. J. Green, Yurii A. Vlasov, Solomon Assefa
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Abstract: We demonstrate digital tuning of the slow-light regime in silicon photonic-crystal waveguides by performing atomic layer deposition of hafnium oxide. The high group-index regime was deterministically controlled (red-shift of 140 +/- 10 pm per atomic layer) without affecting the group-velocity dispersion and third-order dispersion. Additionally, differential tuning of 110 +/- 30 pm per monolayer of the slow-light TE-like and TM-like modes was observed. This passive post-fabrication process has potential applications including the tuning of chip-scale optical interconnects, as well as Raman and parametric amplification.
Comments: 14 pages, 5 figures
Subjects: Optics (physics.optics)
Cite as: arXiv:0912.0788 [physics.optics]
  (or arXiv:0912.0788v1 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.0912.0788
Related DOI: https://doi.org/10.1063/1.3308492

Submission history

From: Charlton Chen [view email]
[v1] Fri, 4 Dec 2009 20:50:25 UTC (658 KB)
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