Computer Science > Other Computer Science
[Submitted on 7 May 2008]
Title:High Q-factor CMOS-MEMS inductor
View PDFAbstract: This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS process. In order to reduce the substrate loss and enhance the Q-factor of the inductor, silicon substrate under the inductor is removed using a post-process. The post-process uses RIE (reactive ion etching) to etch the sacrificial layer of silicon dioxide, and then TMAH (tetra methyl ammonium hydroxide) is employed to remove the underlying silicon substrate and obtain the suspended spiral inductor. The advantage of the post process is compatible with the CMOS process. The Agilent 8510C network analyzer and a Cascade probe station are used to measure the performances of the spiral inductor. Experiments indicate that the spiral inductor has a Q-factor of 15 at 11 GHz, an inductance of 4 nH at 25.5 GHz and a self-resonance frequency of about 27 GHz.
Submission history
From: EDA Publishing Association [view email] [via CCSD proxy][v1] Wed, 7 May 2008 09:34:56 UTC (436 KB)
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.