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Computer Science > Other Computer Science

arXiv:0802.3102 (cs)
[Submitted on 21 Feb 2008]

Title:Modeling of T-Shaped Microcantilever Resonators

Authors:M. Narducci, E. Figueras, I. Gracia, L. Fonseca, J. Santander, C. Cané
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Abstract: The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both the spring constant (k) and mass (m) of the resonator. The aim of this work was to model a cantilever structure to determine the optimal dimensions in which the resonance frequency would be a function dominated by mass changes and not stiffness changes. In order to validate the model a set of microcantilevers were fabricated and characterized.
Comments: Submitted on behalf of EDA Publishing Association (this http URL)
Subjects: Other Computer Science (cs.OH)
Cite as: arXiv:0802.3102 [cs.OH]
  (or arXiv:0802.3102v1 [cs.OH] for this version)
  https://doi.org/10.48550/arXiv.0802.3102
Journal reference: Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Submission history

From: EDA Publishing Association [view email] [via CCSD proxy]
[v1] Thu, 21 Feb 2008 13:45:15 UTC (160 KB)
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Margarita Narducci
Eduard Figueras
Isabel Gracia
Luis Fonseca
Joaquin Santander
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