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Condensed Matter > Materials Science

arXiv:cond-mat/0511475 (cond-mat)
[Submitted on 18 Nov 2005]

Title:A near-field scanned microwave probe for spatially localized electrical metrology

Authors:Vladimir V. Talanov, Andre Scherz, Robert L. Moreland, Andrew R. Schwartz
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Abstract: We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine close to 100 percent of the probe net sampling reactive energy, thus making the response virtually independent on the sample properties outside of this region. The probe is formed by a 4 GHz balanced stripline resonator with a few-micron tip size. It provides non-contact, non-invasive measurement and is uniquely suited for spatially localized electrical metrology applications, e.g. on semiconductor production wafers.
Comments: 6 pages, 3 figures, submitted to Appl. Phys. Lett
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:cond-mat/0511475 [cond-mat.mtrl-sci]
  (or arXiv:cond-mat/0511475v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.cond-mat/0511475
Journal reference: Appl. Phys. Lett. 88(13), 134106 (2006)
Related DOI: https://doi.org/10.1063/1.2189147

Submission history

From: Vladimir Talanov [view email]
[v1] Fri, 18 Nov 2005 18:11:16 UTC (120 KB)
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