Title:Ultralow-temperature ultrafast synthesis of wafer-scale single-crystalline graphene via metal-assisted graphitization of silicon-carbide

Abstract:Non-conventional epitaxial techniques, such as vdWE and remote epitaxy, have attracted substantial attention in the semiconductor research community for their exceptional capability to continuously produce high-quality free-standing films. The successful implementation of these emerging epitaxial techniques crucially hinges on creating a robust uniform 2D material surface at the wafer-scale and with atomically precise uniformity. The conventional method for fabricating graphene on a SiC wafer is through high-temperature graphitization, which produces epitaxial graphene on the surface of the SiC wafer. However, the extremely high temperature needed for silicon sublimation (> 1500 C) causes step-bunching of the SiC surface in addition to the growth of uneven graphene at the edges of the step, leading to multilayer graphene stripes and unfavorable surface morphology for epitaxial growth. Here, we fully develop a graphitization technique that allows fast synthesis of single-crystalline graphene at ultra-low temperatures (growth time of less than 1 min and growth temperature of less than 500 C) at wafer-scale by metal-assisted graphitization. We found annealing conditions that enable SiC dissociation while avoiding silicide formation, which produces single-crystalline graphene while maintaining atomically smooth surface morphology. The thickness of the graphene layer can be precisely controlled by varying the metal thickness or annealing temperature. We successfully produce freestanding single-crystalline ultra-wide bandgap (AlN, GaN) films on graphene/SiC via the 2D material-based layer transfer technique. Our results show that low-temperature graphene synthesis via MAG represents a promising route for the commercialization of the 2D-based epitaxy technique, enabling the production of large-scale ultra-wide bandgap free-standing crystalline membranes.