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Physics > Instrumentation and Detectors

arXiv:2412.15710 (physics)
[Submitted on 20 Dec 2024]

Title:Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer

Authors:Matteo Canciani, Stefano Vichi, Oksana Koplak, Sergio Bietti, Stefano Sanguinetti
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Abstract:A novel approach for the measurement of the Nitrogen active species generated by a plasma source in the molecular beam epitaxy environment is here presented. The method is based on the analysis of the variations in the optical signal measured by a pyrometer during a two step, Gallium rich and Nitrogen controlled, growth modes. The method permits a precise, quantitative and direct measurement of the flux of active species as a function of the plasma generation parameters of the cell: nitrogen gas flux and RF-power.
Subjects: Instrumentation and Detectors (physics.ins-det); Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:2412.15710 [physics.ins-det]
  (or arXiv:2412.15710v1 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.2412.15710

Submission history

From: Matteo Canciani [view email]
[v1] Fri, 20 Dec 2024 09:30:53 UTC (1,431 KB)
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