Condensed Matter > Materials Science
[Submitted on 7 Aug 2024 (v1), last revised 8 Aug 2024 (this version, v2)]
Title:Autonomous, Self-driving Multi-Step Growth of Semiconductor Heterostructures Guided by Machine Learning
View PDFAbstract:The semiconductor industry has prioritized automating repetitive tasks by closed-loop, autonomous experimentation which enables accelerated optimization of complex multi-step processes. The emergence of machine learning (ML) has ushered in automated process with minimal human intervention. In this work, we develop SemiEpi, a self-driving automation platform capable of executing molecular beam epitaxy (MBE) growth with multi-steps, continuous in-situ monitoring, and on-the-fly feedback control. By integrating standard hardware, homemade software, curve fitting, and multiple ML models, SemiEpi operates autonomously, eliminating the need for extensive expertise in MBE processes to achieve optimal outcomes. The platform actively learns from previous experimental results, identifying favorable conditions and proposing new experiments to achieve the desired results. We standardize and optimize growth for InAs/GaAs quantum dots (QDs) heterostructures to showcase the power of ML-guided multi-step growth. A temperature calibration was implemented to get the initial growth condition, and fine control of the process was executed using ML. Leveraging RHEED movies acquired during the growth, SemiEpi successfully identified and optimized a novel route for multi-step heterostructure growth. This work demonstrates the capabilities of closed-loop, ML-guided systems in addressing challenges in multi-step growth for any device. Our method is critical to achieve repeatable materials growth using commercially scalable tools. Our strategy facilitates the development of a hardware-independent process and enhancing process repeatability and stability, even without exhaustive knowledge of growth parameters.
Submission history
From: Chao Zhao [view email][v1] Wed, 7 Aug 2024 02:19:17 UTC (1,401 KB)
[v2] Thu, 8 Aug 2024 15:37:19 UTC (1,218 KB)
Current browse context:
cond-mat.mtrl-sci
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
IArxiv Recommender
(What is IArxiv?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.