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Electrical Engineering and Systems Science > Systems and Control

arXiv:2406.07784 (eess)
[Submitted on 12 Jun 2024]

Title:Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators

Authors:Luca Colombo, Gabriel Giribaldi, Ryan Tetro, Jack Guida, Walter Gubinelli, Luca Spagnuolo, Nicol Maietta, Siddhartha Ghosh, Matteo Rinaldi
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Abstract:This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated piezoelectric micro- and nano-electromechanical (M/NEMS) resonators. The proposed approach models the mechanical quality factor (Qm) and its dependency on piezoelectric (Qpiezo) and metal (Qmetal) acoustic losses, as a function of the mode of vibration dispersion characteristics. The model is finally experimentally validated by exploiting the intrinsic on-chip multifrequency manufacturability of interdigitated devices. A broad range of available resonator technologies, frequencies, and piezoelectric materials are investigated for this purpose, including bulk X-cut Lithium Niobate (XLN) leaky surface acoustic wave resonators operating at Ultra High Frequency (UHF), thin film XLN Lamb Wave resonators spanning between Very High Frequency (VHF) and the Ku band, and Aluminum Nitride (AlN) and scandium-doped AlN (ScAlN) cross-sectional lame' mode resonators ranging from the Ku to Ka band (mmWave).
Comments: To be presented at IUS 2024
Subjects: Systems and Control (eess.SY)
Cite as: arXiv:2406.07784 [eess.SY]
  (or arXiv:2406.07784v1 [eess.SY] for this version)
  https://doi.org/10.48550/arXiv.2406.07784

Submission history

From: Luca Colombo [view email]
[v1] Wed, 12 Jun 2024 00:26:58 UTC (1,879 KB)
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