Physics > Applied Physics
[Submitted on 30 Jan 2024]
Title:In situ investigation of growth modes during plasma-assisted molecular beam epitaxy of (0001)GaN
View PDFAbstract:Real-time analysis of the growth modes during homoepitaxial (0001)GaN growth by plasma-assisted molecular beam epitaxy was performed using reflection high energy electron diffraction. A growth mode map was established as a function of Ga/N flux ratio and growth temperature, exhibiting distinct transitions between three-dimensional (3D), layer-by-layer and step-flow growth mode. The layer-by-layer to step-flow growth transition under Ga-rich growth was surfactant mediated and related to a Ga adlayer coverage of one monolayer. Under N-rich conditions the transition from 3D to layer-by-layer growth was predominantly thermally activated, facilitating two-dimensional growth at temperatures of thermal decomposition.
Submission history
From: Sergio Fernández-Garrido [view email][v1] Tue, 30 Jan 2024 13:14:33 UTC (891 KB)
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