Physics > Applied Physics
[Submitted on 3 May 2023]
Title:CMOS image sensor with micro-nano holes to improve NIR optical efficiency: micro-holes on top surface vs on bottom
View PDFAbstract:We study the nano- and micro-structures that increase the optical efficiency of the CMOS image pixels in visible and infrared. We consider the difference between the micro-holes at the pixels' bottom and the top and the holes that are composed of smaller holes. Those solutions can facilitate the fabrication. We study the crosstalk and the optical efficiency dependence on the angle of incident of light and numerical aperture for the pixels in a camera setup.
Submission history
From: Ekaterina Ponizovskaya-Devine [view email][v1] Wed, 3 May 2023 17:56:33 UTC (1,049 KB)
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