Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 1 Mar 2023 (this version), latest version 16 May 2023 (v2)]
Title:Creation of single vacancies in hBN with electron irradiation
View PDFAbstract:Understanding electron irradiation effects is vital not only for reliable characterization of materials using transmission electron microscopy, but increasingly also for the controlled manipulation of two-dimensional materials. Knock-on displacements due to elastic electron backscattering are theoretically straightforward to model, and appear to correctly describe damage in pristine graphene. For semiconducting MoS$_2$, some experimental and theoretical progress has been recently made, indicating that a combination of elastic and inelastic effects appears to be needed to explain experiments. For insulating hexagonal boron nitride (hBN), however, much less is currently known. We measure the displacement cross sections of suspended monolayer hBN using aberration-corrected scanning transmission electron microscopy in near ultra-high vacuum at primary beam energies between 50 and 90~keV. We find damage rates below 80~keV up to three orders of magnitude lower than previously measured at hBN edges under comparatively poorer residual vacuum conditions where chemical etching appears to have been the dominant damage mechanism. Notably, we are now able to show that it is possible to create single vacancies in hBN using electron irradiation, and resolve that boron are almost twice as likely as nitrogen to be ejected below 80~keV. Moreover, any damage at such low energies cannot be explained by pure elastic knock-on, even when accounting for vibrations of the atoms. We thus develop a theoretical description that accounts for a lowering of the displacement threshold energy due to valence ionization resulting from inelastic scattering of probe electrons, and model this using charge-constrained density functional theory molecular dynamics. Our findings show the potential for defect-engineering of hBN at the level of single vacancies using electron irradiation.
Submission history
From: Thuy An Bui [view email][v1] Wed, 1 Mar 2023 13:28:44 UTC (12,018 KB)
[v2] Tue, 16 May 2023 14:18:50 UTC (12,679 KB)
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