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Physics > Optics

arXiv:2211.06896 (physics)
This paper has been withdrawn by Weikang Xu
[Submitted on 13 Nov 2022 (v1), last revised 14 Dec 2022 (this version, v2)]

Title:Compact On-Chip crystalline Resonator Integration with Etching Tapered Fiber Waveguide

Authors:Jun Yue, Jiamin Rong, Enbo Xing, Weikang Xu, Jiamin Bai, Wenyao Liu, Jun Tang, Jun Liu
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Abstract:Whispering-gallery mode crystalline resonators currently maintain the best quality factor (Q) record, however, compact on-chip packaging is still a challenge although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the Q of on-chip crystalline resonator exceeds 108. Additionally, TEC is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/K is consistent with the theoretical calculation.
Comments: The manuscript has an error display and needs to be corrected
Subjects: Optics (physics.optics)
Cite as: arXiv:2211.06896 [physics.optics]
  (or arXiv:2211.06896v2 [physics.optics] for this version)
  https://doi.org/10.48550/arXiv.2211.06896
Related DOI: https://doi.org/10.1364/AO.477764

Submission history

From: Weikang Xu [view email]
[v1] Sun, 13 Nov 2022 13:07:57 UTC (1,315 KB)
[v2] Wed, 14 Dec 2022 07:58:49 UTC (1 KB) (withdrawn)
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