Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:2208.02591 (cond-mat)
[Submitted on 4 Aug 2022 (v1), last revised 26 Jan 2024 (this version, v2)]

Title:Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

Authors:Daniel Schiwietz, Eva M. Weig, Peter Degenfeld-Schonburg
View PDF
Abstract:Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems.
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:2208.02591 [cond-mat.mes-hall]
  (or arXiv:2208.02591v2 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.2208.02591
Journal reference: Microsystems & Nanoengineering 9, 11 (2023)
Related DOI: https://doi.org/10.1038/s41378-022-00480-1

Submission history

From: Daniel Schiwietz [view email]
[v1] Thu, 4 Aug 2022 11:43:08 UTC (910 KB)
[v2] Fri, 26 Jan 2024 12:45:20 UTC (354 KB)
Full-text links:

Access Paper:

  • View PDF
  • TeX Source
  • Other Formats
view license
Current browse context:
cond-mat
< prev   |   next >
new | recent | 2022-08
Change to browse by:
cond-mat.mes-hall

References & Citations

export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
IArxiv Recommender (What is IArxiv?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)