Physics > Applied Physics
[Submitted on 8 Dec 2021]
Title:A MEMS-based optical scanning system for precise, high-speed neural interfacing
View PDFAbstract:Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of optical modulators is a major bottleneck for throughput and limits random-access targeting capabilities. While fast lateral scanners exist, commercially available varifocal elements are constrained to >3ms settling times, limiting the speed of the overall system to hundreds of Hz. Faster focusing methods exist but cannot combine fast operation and dwelling capability with electrical and optical efficiency. Here, we present a varifocal mirror comprised of an array of piston-motion MEMS micromirrors and a custom driver ASIC, offering fast operation with dwelling capability while maintaining high diffraction efficiency. The ASIC features a reconfigurable nonlinear DAC to simultaneously compensate for the built-in nonlinearity of electrostatic actuators and the global process variations in MEMS mirrors. Experimental results demonstrate a wide continuous sweeping range that spans 22 distinctly resolvable depth planes with refresh rates greater than 12 kHz.
Current browse context:
q-bio
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.