Physics > Applied Physics
[Submitted on 8 Jan 2020]
Title:UV-laser modification and selective ion-beam etching of amorphous vanadium pentoxide thin films
View PDFAbstract:We present the results on excimer laser modification and patterning of amorphous vanadium pentoxide films. Wet positive resist-type and Ar ion-beam negative resist-type etching techniques were employed to develop UV-modified films. V2O5 films were found to possess sufficient resistivity compared to standard electronic materials thus to be promising masks for sub-micron lithog-raphy
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