Skip to main content
We gratefully acknowledge support from the Simons Foundation, member institutions, and all contributors. Donate
arXiv logo
Cornell University Logo

Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:1810.06521 (cond-mat)
[Submitted on 15 Oct 2018 (v1), last revised 21 Jan 2019 (this version, v2)]

Title:Quantum transport properties of industrial $^{28}$Si/$^{28}$SiO$_2$

Authors:D. Sabbagh, N. Thomas, J. Torres, R. Pillarisetty, P. Amin, H. C. George, K. Singh, A. Budrevich, M. Robinson, D. Merrill, L. Ross, J. Roberts, L. Lampert, L. Massa, S. Amitonov, J. Boter, G. Droulers, H. G. J. Eenink, M. van Hezel, D. Donelson, M. Veldhorst, L. M. K. Vandersypen, J. S. Clarke, G. Scappucci
View PDF
Abstract:We investigate the structural and quantum transport properties of isotopically enriched $^{28}$Si/$^{28}$SiO$_2$ stacks deposited on 300 mm Si wafers in an industrial CMOS fab. Highly uniform films are obtained with an isotopic purity greater than 99.92\%. Hall-bar transistors with an equivalent oxide thickness of 17 nm are fabricated in an academic cleanroom. A critical density for conduction of $1.75\times10^{11}$ cm$^{-2}$ and a peak mobility of 9800 cm$^2$/Vs are measured at a temperature of 1.7 K. The $^{28}$Si/$^{28}$SiO$_2$ interface is characterized by a roughness of $\Delta=0.4$ nm and a correlation length of $\Lambda=3.4$ nm. An upper bound for valley splitting energy of 480 $\mu$eV is estimated at an effective electric field of 9.5 MV/m. These results support the use of wafer-scale $^{28}$Si/$^{28}$SiO$_2$ as a promising material platform to manufacture industrial spin qubits.
Comments: 5 pages, 3 figures
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:1810.06521 [cond-mat.mes-hall]
  (or arXiv:1810.06521v2 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.1810.06521
Journal reference: Phys. Rev. Applied 12, 014013 (2019)
Related DOI: https://doi.org/10.1103/PhysRevApplied.12.014013

Submission history

From: Giordano Scappucci [view email]
[v1] Mon, 15 Oct 2018 17:12:49 UTC (1,146 KB)
[v2] Mon, 21 Jan 2019 10:18:30 UTC (1,949 KB)
Full-text links:

Access Paper:

  • View PDF
  • TeX Source
  • Other Formats
view license
Current browse context:
cond-mat.mes-hall
< prev   |   next >
new | recent | 2018-10
Change to browse by:
cond-mat

References & Citations

1 blog link

(what is this?)
export BibTeX citation

Bookmark

BibSonomy logo Reddit logo

Bibliographic and Citation Tools

Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)

Code, Data and Media Associated with this Article

alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)

Demos

Replicate (What is Replicate?)
Hugging Face Spaces (What is Spaces?)
TXYZ.AI (What is TXYZ.AI?)

Recommenders and Search Tools

Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
IArxiv Recommender (What is IArxiv?)

arXivLabs: experimental projects with community collaborators

arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.

Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.

Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.

Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)