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Physics > Instrumentation and Detectors

arXiv:1802.05621 (physics)
[Submitted on 15 Feb 2018]

Title:Low Vibration Laboratory with a Single-Stage Vibration Isolation for Microscopy Applications

Authors:Bert Voigtländer, Peter Coenen, Vasily Cherepanov, Peter Borgens, Thomas Duden, F. Stefan Tautz
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Abstract:The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate is discussed. The optimization of the air spring system lead to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
Subjects: Instrumentation and Detectors (physics.ins-det)
Cite as: arXiv:1802.05621 [physics.ins-det]
  (or arXiv:1802.05621v1 [physics.ins-det] for this version)
  https://doi.org/10.48550/arXiv.1802.05621
Related DOI: https://doi.org/10.1063/1.5008390

Submission history

From: Peter Borgens [view email]
[v1] Thu, 15 Feb 2018 15:33:39 UTC (1,334 KB)
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