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Computer Science > Other Computer Science

arXiv:1710.02921 (cs)
[Submitted on 9 Oct 2017]

Title:Hotspot-aware DSA Grouping and Mask Assignment

Authors:Yasmine Badr, Puneet Gupta
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Abstract:In Directed Self Assembly (DSA), poor printing of guiding templates can cause misassembly resulting in high defect probability. Therefore, hotspots should be avoided in the choice of the DSA groups. Accordingly, Directed Self-Assembly (DSA) technologies which use Multiple Patterning (MP) to print the guiding templates need to be aware of hotspots during the DSA grouping and MP Decomposition. In this paper, we present a hotspot-aware heuristic for DSA grouping and MP decomposition. Results show that that the proposed heuristic eliminates 78% of the hotspots and conflicts that result from using a hotspot-unaware grouping and decomposition algorithm. In comparison to the optimal solution using Integer Linear Programming, the proposed heuristic results in ~24% more violations.
Comments: 5 pages
Subjects: Other Computer Science (cs.OH)
Cite as: arXiv:1710.02921 [cs.OH]
  (or arXiv:1710.02921v1 [cs.OH] for this version)
  https://doi.org/10.48550/arXiv.1710.02921

Submission history

From: Yasmine Badr [view email]
[v1] Mon, 9 Oct 2017 02:55:33 UTC (449 KB)
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