Condensed Matter > Mesoscale and Nanoscale Physics
[Submitted on 16 Aug 2016 (v1), last revised 10 Dec 2016 (this version, v3)]
Title:Fabrication of mirror templates in silica with micron-sized radii of curvature
View PDFAbstract:We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of curvature $\lesssim5$ microns at shallow depth and low surface roughness of 2 angstroms. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structure within a tunable Fabry-Perot type microcavity, demonstrate near-coating-limited loss rates (F = 25,000) and small focal lengths consistent with their geometrical dimensions.
Submission history
From: Daniel Najer [view email][v1] Tue, 16 Aug 2016 09:25:47 UTC (622 KB)
[v2] Tue, 4 Oct 2016 13:58:39 UTC (840 KB)
[v3] Sat, 10 Dec 2016 22:55:10 UTC (838 KB)
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