Quantum Physics
[Submitted on 19 May 2014 (v1), revised 11 Jun 2014 (this version, v2), latest version 29 Jun 2015 (v4)]
Title:Ultrasensitive measurement of MEMS cantilever displacement sensitivity below the shot noise limit
View PDFAbstract:The displacement of micro-electro-mechanical-systems (MEMS) cantilevers is used to measure a broad variety of phenomena in devices ranging from force microscopes to biochemical sensors to thermal imaging systems. We demonstrate the first direct measurement of a MEMS cantilever displacement with a noise floor at 40% of the shot noise limit (SNL). By combining multi-spatial-mode quantum light sources with a simple ?differential measurement, we show that sub-SNL MEMS displacement sensitivity is highly accessible compared to previous efforts that measured the displacement of macroscopic mirrors with very distinct spatial structures crafted with multiple optical parametric amplifiers and locking loops. These results support a new class of quantum MEMS sensor with an ultimate signal to noise ratio determined by quantum correlations, enabling ultra-trace sensing, imaging, and microscopy applications in which signals were previously obscured by shot noise.
Submission history
From: Benjamin Lawrie [view email][v1] Mon, 19 May 2014 15:34:38 UTC (189 KB)
[v2] Wed, 11 Jun 2014 17:53:39 UTC (190 KB)
[v3] Sat, 4 Apr 2015 03:42:53 UTC (231 KB)
[v4] Mon, 29 Jun 2015 11:45:34 UTC (231 KB)
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