Condensed Matter > Materials Science
[Submitted on 1 Nov 2013 (v1), revised 8 Jan 2014 (this version, v2), latest version 6 Apr 2014 (v3)]
Title:Top-down fabrication of large-area GaN micro- and nanopillars
View PDFAbstract:Large-area gallium nitride (GaN) micro- and nano-pillar (NP) arrays were fabricated by plasma etching of lithographically-patterned GaN thin-film grown on Si substrate. Deep-UV lithography, inductively-coupled plasma (ICP) etching, and subsequent chemical treatments were effectively utilized to fabricate GaN pillars with diameters ranging from 250 nm to 10 {\mu}m. The impact of various plasma etching process parameters and chemical etchants on the morphology, strain, and surface defects of these NPs were studied using scanning-electron microscopy
Submission history
From: Dipak Paramanik [view email][v1] Fri, 1 Nov 2013 22:53:13 UTC (693 KB)
[v2] Wed, 8 Jan 2014 19:09:13 UTC (1,089 KB)
[v3] Sun, 6 Apr 2014 00:40:23 UTC (742 KB)
Current browse context:
cond-mat.mtrl-sci
Change to browse by:
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
Connected Papers (What is Connected Papers?)
CORE Recommender (What is CORE?)
IArxiv Recommender
(What is IArxiv?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.