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Condensed Matter > Materials Science

arXiv:1306.3367 (cond-mat)
[Submitted on 14 Jun 2013]

Title:Time-dependent relaxation of strained silicon-on-insulator lines using a partially coherent x-ray nanobeam

Authors:Francesca Mastropietro, Joël Eymery, Gerardina Carbone, Sophie Baudot, François Andrieu, Vincent Favre-Nicolin
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Abstract:We report on the quantitative determination of the strain map in a strained Silicon-On-Insulator (sSOI) line with a 200x70 nm^2 cross-section. In order to study a single line as a function of time, we used an X-ray nanobeam with relaxed coherence properties as a compromise between beam size, coherence and intensity. We demonstrate how it is possible to reconstruct the line deformation at the nanoscale, and follow its evolution as the line relaxes under the influence of the X-ray nanobeam.
Comments: 5 pages, 4 figures
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1306.3367 [cond-mat.mtrl-sci]
  (or arXiv:1306.3367v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1306.3367
Journal reference: Phys. Rev. Lett. 111, 215502 (2013)
Related DOI: https://doi.org/10.1103/PhysRevLett.111.215502

Submission history

From: Vincent Favre-Nicolin [view email]
[v1] Fri, 14 Jun 2013 11:48:18 UTC (1,045 KB)
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